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Browsing by Author "Yihwan, Kim"

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    Impact of recessed S/D SiGe integration parameters on device performance

    Washington, Lori
    ;
    Nouri, Faran
    ;
    Verheyen, Peter  
    ;
    Moroz, Victor
    ;
    Kawaguchi, Marc
    ;
    Yihwan, Kim
    Proceedings paper
    2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.515-522
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    Integration of a recessed SiGe Source/Drain into a PMOS transistor

    Washington, Lori
    ;
    Nouri, Faran
    ;
    Verheyen, Peter  
    ;
    De Wolf, Ingrid  
    ;
    Moroz, Victor
    ;
    Kawaguchi, Mark
    Proceedings paper
    2005, 5th International SEMI-ECS Semiconductor Technology Conference, 15/03/2005

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