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Browsing by Author "Yoshida, Yukifuni"

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    Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial process

    Masaoka, Toru
    ;
    Gan, Nobuko
    ;
    Fujimura, Yu
    ;
    Ogawa, Yuichi
    ;
    Wostyn, Kurt  
    ;
    Pacco, Antoine  
    Proceedings paper
    2016, Ultra Clean Processing of Semiconductor Surfaces XIII, 11/09/2016, p.27-30

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