Browsing by Author "Yuan, Xiao Jie"

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Analysis of plasma induced gate oxide damage in multi-level metal processing

Yuan, Xiao Jie
;
Van den Bosch, Geert
;
Lietaer, Nicolas
;
Zagrebnov, Maxim
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Debusschere, Ingrid
Proceedings paper
1998, Proceedings 15th International VLSI Multilevel Interconnection Conference - VMIC, 16/06/1998, p.405-409
Innovating SRAM design and test program for fast process related defect recognition and failure analysis

Coppens, P.
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Vanhorebeek, Guido
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De Backer, E.
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Yuan, Xiao Jie
Proceedings paper
1999, In-Line Methods and Monitors for Process and Yield Improvement, 22/09/1999, p.290-297
Innovating SRAM design for fast process related defect recognition and failure analysis

Coppens, P.
;
Vanhorebeek, Guido
;
De Backer, E.
;
Yuan, Xiao Jie
Proceedings paper
1999, ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference, 13/09/1999, p.220-223