Browsing by Author "Yue, Henry"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication UV-induced modification of fluorocarbon polymer for improvement of wet removal
; ; ; Journal article2014, Microelectronic Engineering, 114, p.136-140Publication UV-induced modification of fluorocarbon polymer for improvement of wet removal
; ; ; Meeting abstract2012, Sematech Surface Preparation and Cleaning Conference - SPCC, 19/03/2012