Browsing by Author "Zagrebnov, Maxim"
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Publication Analysis of plasma induced gate oxide damage in multi-level metal processing
Proceedings paper1998, Proceedings 15th International VLSI Multilevel Interconnection Conference - VMIC, 16/06/1998, p.405-409Publication Formation of ultra-thin PtSi layers with a 2-step silicidation process
; ; Journal article1997, Microelectronic Engineering, 37/38, p.507-514Publication IR PTSI imagers with integrated microlenses
Oral presentation1996, IR-Colloquium; April 29-30, 1996; Freiburg, Germany.Publication New approaches for formation of ultra-thin PtSi layers for infrared applications
Proceedings paper1998, Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits, 13/04/1998, p.241Publication New approaches for formation of ultra-thin PtSi layers for infrared applications
Proceedings paper1998, Rapid Thermal and Integrated Processing VII, 13/04/1998, p.307-312Publication The analysis of the limiting recombination mechanisms on high efficiency thin film cells grown with CVD epitaxy
Proceedings paper1995, 13th European Photovoltaic Solar Energy Conference and Exhibition. Proceedings of the International Conference, 23/10/1995, p.440-443