Browsing by Author "Zahka, J."
Now showing 1 - 3 of 3
- Results per page
- Sort Options
Publication Photoresist filtration performance of UPE and PTFE filters
Proceedings paper1996, Proceedings of the Institute of the Environmental Sciences: 42nd Annual Technical Meeting, 12/05/1996, p.259-267Publication Point of use HF purification for Si surface preparation
Proceedings paper1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.131-134Publication Point of use HF purification for silicon surface preparation by ion exchange
Journal article1997, Journal of the Electrochemical Society, (144) 6, p.2189-2196