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    Effects of He plasma pre-treatment on low-k damage during post Cu surface ceaning with NH3 plasma

    Urbanowicz, Adam
    ;
    Shamiryan, Denis
    ;
    Zaka, Alban
    ;
    Verdonck, Patrick  
    ;
    De Gendt, Stefan  
    Journal article
    2010, Journal of the Electrochemical Society, (157) 5, p.H565-H573

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