Browsing by Author "Zandbergen, Peter"
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Publication Characterization and optimization of positive tone DUV resists on TiN substrates
Proceedings paper1997, Advances in Resist Technology and Processing XIV, 10/03/1997, p.314-323Publication Limits of optical lithography
Proceedings paper2000, Optical Microlithography XIII, 1/03/2000, p.373-387Publication Proximity bias swing: origin and characterization
Proceedings paper2009, Advances in Resist Technology and Processing XV, 23/02/1998, p.837-844