Browsing by Author "Zawadzki, Mary T."
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Publication A 65-nm node SRAM solution using alt-PSM with ArF lithography
;Driessen, Frank ;Zawadzki, Mary T. ;Krishnan, Prakash R.Balasinski, ArturProceedings paper2004-05, Design and Process Integration for Microelectronic Manufacturing II, 22/02/2004, p.224-234