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Browsing by Author "Zawadzki, Mary T."

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    A 65-nm node SRAM solution using alt-PSM with ArF lithography

    Driessen, Frank
    ;
    Zawadzki, Mary T.
    ;
    Krishnan, Prakash R.
    ;
    Balasinski, Artur
    Proceedings paper
    2004-05, Design and Process Integration for Microelectronic Manufacturing II, 22/02/2004, p.224-234

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