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Browsing by Author "Zenasni, Aziz"

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    Ultra-low-k by CVD: deposition and curing

    Jousseaume, Vincent
    ;
    Zenasni, Aziz
    ;
    Gourhant, Olivier
    ;
    Favennec, Laurent
    ;
    Baklanov, Mikhaïl
    Book chapter
    2012

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