Browsing by Author "Zeng, Qinglin"
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Publication Enablement of 0.55NA EUV Bright Field Mask Stitching
Proceedings paper2025, 2025 Conference on Optical and EUV Nanolithography, 2025-04-25, p.134240J-1-134240J-9Publication OPC and modeling solution to support 0.55 NA EUV stitching
Journal article2025, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (24) 4, p.041203Publication OPC and Modeling Solution to Support 0.55NA EUV Stitching
Proceedings paper2024, 2024 International Conference on Extreme Ultraviolet Lithography, SEP 30-OCT 03, 2024, p.Art. 1321507