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Browsing by Author "Zhichun, Wang"

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    Correlation between hot carrier stress, oxide breakdown and gate leakage current for monitoring plasma processing induced damage on gate oxide

    Zhichun, Wang
    ;
    Ackaert, J.
    ;
    Salm, C.
    ;
    de Backer, E.
    ;
    Van den Bosch, Geert  
    ;
    Zawalski, Wade
    Proceedings paper
    2002, Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA, 8/07/2002, p.242-245

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