Browsing by Author "Zibold, Axel"
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Publication Compensating mask topography effects in CPL through-pitch solutions toward the 45nm node
Proceedings paper2005, 25th Annual BACUS Symposium on Photomask Technology, 3/10/2005, p.59921OPublication Image imbalance compensation in alternating phase-shift masks towards the 45 node through-pitch imaging
Proceedings paper2005, 25th Annual BACUS Symposium on Photomask Technology, 2/10/2005, p.59921S