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Browsing by Author "Zimmermann, Rainer"

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    Efficient mask characterization through automated contour and corner rounding extraction

    Zimmermann, Rainer
    ;
    Bekaert, Joost  
    ;
    Braylovska, Mariya
    ;
    Baskaran, Balakumar  
    ;
    Philipsen, Vicky  
    Proceedings paper
    2023, 38th European Mask and Lithography Conference - EMLC, 2023-06-19, p.128020J

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