Browsing by Author "Zou, Yi"
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Publication EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes
Proceedings paper2016, Extreme Ultraviolet (EUV) Lithography VII, 21/02/2016, p.97761WPublication Feasibility study of grapho-epitaxy DSA for complementing EUV lithography beyond N10