Browsing by Author "Zulehner, W."
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Publication Investigation of crystal defects in As-grown and processed silicon wafers and heteroepitaxial layers by infrared light scattering
;Kissinger, G. ;Vanhellemont, Jan ;Gräf, D. ;Zulehner, W. ;Claeys, CorRichter, H.Proceedings paper1995, ALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II. Proceedings of the Satellite Sympo, 28/09/1995, p.156-165