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Browsing by Author "Zulehner, W."

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    Investigation of crystal defects in As-grown and processed silicon wafers and heteroepitaxial layers by infrared light scattering

    Kissinger, G.
    ;
    Vanhellemont, Jan
    ;
    Gräf, D.
    ;
    Zulehner, W.
    ;
    Claeys, Cor
    ;
    Richter, H.
    Proceedings paper
    1995, ALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II. Proceedings of the Satellite Sympo, 28/09/1995, p.156-165

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