Browsing by Author "Zverev, A.V."
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Publication Evaluation of thin Ta(N) film integrity deposited on porous glasses
Journal article2003, Optica Applicata, 33, p.91-96Publication Simulations of diffusion barrier deposition on porous low-k films
Journal article2003-11, Microelectronic Engineering, (70) 2_4, p.363-367