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Browsing by Author "Zverev, A.V."

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    Evaluation of thin Ta(N) film integrity deposited on porous glasses

    Shamiryan, Denis
    ;
    Baklanov, Mikhaïl
    ;
    Yanovitskaya, Z.S.
    ;
    Zverev, A.V.
    ;
    Tokei, Zsolt  
    Journal article
    2003, Optica Applicata, 33, p.91-96
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    Simulations of diffusion barrier deposition on porous low-k films

    Yanovitskaya, Z.S.
    ;
    Zverev, A.V.
    ;
    Shamiryan, Denis
    ;
    Maex, Karen  
    Journal article
    2003-11, Microelectronic Engineering, (70) 2_4, p.363-367

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