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Browsing by Author "de Klerk, Jos"

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    Proximity bias swing: origin and characterization

    Zandbergen, Peter
    ;
    Gehoel-van Ansem, Wendy
    ;
    de Klerk, Jos
    ;
    Vandenberghe, Geert  
    ;
    Linskens, Frank
    Proceedings paper
    2009, Advances in Resist Technology and Processing XV, 23/02/1998, p.837-844

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