Browsing by Author "dhayalan,"
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Publication Selective epitaxial growth of high-P Si:P for dource/drain formation in advanced Si nFETs
Meeting abstract2016, PRiME 2016 - 230th ECS Meeting (Fall) - Electrochemical Society: SiGe, Ge & Related Compounds: Materials, Processing and Devices, 2/10/2016, p.2003