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Browsing by Author "dhayalan,"

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    Selective epitaxial growth of high-P Si:P for dource/drain formation in advanced Si nFETs

    Rosseel, Erik  
    ;
    dhayalan,
    ;
    Hikavyy, Andriy  
    ;
    Loo, Roger  
    ;
    Profijt, Harald
    ;
    Kohen, David
    Meeting abstract
    2016, PRiME 2016 - 230th ECS Meeting (Fall) - Electrochemical Society: SiGe, Ge & Related Compounds: Materials, Processing and Devices, 2/10/2016, p.2003

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