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Browsing by Author "dos Santos, Andreia Figueiredo"

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    Pattern deformation mitigation for EUV photoresists using wafer backside cleaning techniques

    Harumoto, Masahiko
    ;
    dos Santos, Andreia Figueiredo
    ;
    Zanders, Wesley
    ;
    Caron, Elke
    Journal article
    2024, JAPANESE JOURNAL OF APPLIED PHYSICS, (63) 3, p.Art. 03SP84

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