Browsing by Author "dos Santos, Andreia Figueiredo"
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Pattern deformation mitigation for EUV photoresists using wafer backside cleaning techniques
;Harumoto, Masahiko ;dos Santos, Andreia Figueiredo ;Zanders, WesleyCaron, ElkeJournal article2024, JAPANESE JOURNAL OF APPLIED PHYSICS, (63) 3, p.Art. 03SP84