Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "ter Meulen, Jan Matthijs"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Fabrication and replication of high efficiency blazed gratings with grayscale electron beam lithography and UV nanoimprint lithography

    Mattelin, Marie  
    ;
    Radosavljevic, Ana  
    ;
    Missinne, Jeroen  
    ;
    Cuypers, Dieter  
    ;
    Kommeren, Sander
    Proceedings paper
    2020, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 2/02/2020, p.1129204

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings