Browsing by Author "van Schoot, J."
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Publication CD control comparison of step & repeat versus step & scan DUV lithography for sub-0.25 μm gate printing
Proceedings paper1998, Optical Microlithography XI, 25/02/1998, p.56-66Publication KrF lithography for 130nm
; Proceedings paper2000, Optical Microlithography XIII, 1/03/2000, p.192-205