Browsing by Author "van de Wijgert, Willem"
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Publication Shallow junctions for sub-100 nm CMOS technology
;Meyssen, Veerle ;Stolk, Peter ;van Zijl, Jeroen ;van Berkum, Jurgenvan de Wijgert, WillemProceedings paper2001, Si Front-End Processing - Physics and Technology of Dopant-Defect Interactions III, 17/04/2001, p.J.3.5.1-J3.5.6