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Browsing by Author "van de Wijgert, Willem"

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    Shallow junctions for sub-100 nm CMOS technology

    Meyssen, Veerle
    ;
    Stolk, Peter
    ;
    van Zijl, Jeroen
    ;
    van Berkum, Jurgen
    ;
    van de Wijgert, Willem
    Proceedings paper
    2001, Si Front-End Processing - Physics and Technology of Dopant-Defect Interactions III, 17/04/2001, p.J.3.5.1-J3.5.6

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