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Browsing by Author "van den Berg, Jaap A."

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    TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

    Barozzi, Mario
    ;
    Iacob, Erica
    ;
    van den Berg, Jaap A.
    ;
    Reading, Michael A.
    ;
    Adelmann, Christoph  
    Journal article
    2013, Surface and Interface Analysis, (45) 1, p.394-397

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