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Browsing by Author "van den Broeke, Doug"

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    Compensating mask topography effects in CPL through-pitch solutions toward the 45nm node

    Bekaert, Joost  
    ;
    Philipsen, Vicky  
    ;
    Vandenberghe, Geert  
    ;
    van den Broeke, Doug
    ;
    Degel, Wolfgang
    Proceedings paper
    2005, 25th Annual BACUS Symposium on Photomask Technology, 3/10/2005, p.59921O

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