Browsing by Author "van der Hoff, Alex"
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Publication Image placement error: closing the gap between overlay and imaging
Journal article2005, Journal Microlith., Microfab., Microsyst., (JM3), (4) 3, p.33006Publication Pattern displacement induced by lens aberrations
Proceedings paper2002, 22nd Annual Bacus Symposium on Photomask Technology, 1/10/2002, p.1155-1162