Browsing by author "Ogle, B."
Now showing items 1-4 of 4
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Electrical properties of thin SiON/Ta2O5 gate dielectric stacks
Houssa, Michel; Degraeve, Robin; Mertens, Paul; Heyns, Marc; Jeon, J. S.; Halliyal, A.; Ogle, B. (1999) -
Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning
Jeon, J. S.; Ogle, B.; Baeyens, Martien; Mertens, Paul (1998) -
Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning
Jeon, J. S.; Ogle, B.; Baeyens, Martien; Mertens, Paul (1999) -
Soft breakdown in very thin Ta2 O5 gate dielectric layers
Houssa, Michel; Mertens, Paul; Heyns, Marc; Heon, J. S.; Halliyal, A.; Ogle, B. (2000)