Electrical properties of thin SiON/Ta2O5 gate dielectric stacks

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Authors

Houssa, Michel; Degraeve, Robin; Mertens, Paul; Heyns, Marc; Jeon, J. S.; Halliyal, A.; Ogle, B.

Issue

11

Journal

J. Appl. Phys.

Volume

86

Title

Electrical properties of thin SiON/Ta2O5 gate dielectric stacks

Publication type

Journal article

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