Publication:

Electrical properties of thin SiON/Ta2O5 gate dielectric stacks

Date

1999

Journal article

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Author(s)

;

Degraeve, Robin

;

;

;

Jeon, J. S.

;

Halliyal, A.

;

Ogle, B.

Journal

J. Appl. Phys.

Statistics

1907 since deposited on 2021-10-06

Acq. date: 2026-04-17