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Electrical properties of thin SiON/Ta2O5 gate dielectric stacks
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Electrical properties of thin SiON/Ta2O5 gate dielectric stacks
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Houssa, Michel
;
Degraeve, Robin
;
Mertens, Paul
;
Heyns, Marc
;
Jeon, J. S.
;
Halliyal, A.
;
Ogle, B.
Journal
J. Appl. Phys.
Abstract
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1905
since deposited on 2021-10-06
2
last month
Acq. date: 2025-12-10
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Metrics
Views
1905
since deposited on 2021-10-06
2
last month
Acq. date: 2025-12-10
Citations