Publication:
Electrical properties of thin SiON/Ta2O5 gate dielectric stacks
Date
| dc.contributor.author | Houssa, Michel | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | Jeon, J. S. | |
| dc.contributor.author | Halliyal, A. | |
| dc.contributor.author | Ogle, B. | |
| dc.contributor.imecauthor | Houssa, Michel | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
| dc.date.accessioned | 2021-10-06T11:22:43Z | |
| dc.date.available | 2021-10-06T11:22:43Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3519 | |
| dc.source.beginpage | 6462 | |
| dc.source.endpage | 6467 | |
| dc.source.issue | 11 | |
| dc.source.journal | J. Appl. Phys. | |
| dc.source.volume | 86 | |
| dc.title | Electrical properties of thin SiON/Ta2O5 gate dielectric stacks | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |