Browsing by author "Vansumere, Wim"
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The need for EUV lithography at advanced technology for sustainable wafer cost
Mallik, Arindam; Vansumere, Wim; Ryckaert, Julien; Mercha, Abdelkarim; Horiguchi, Naoto; Demuynck, Steven; Boemmels, Juergen; Tokei, Zsolt; Vandenberghe, Geert; Ronse, Kurt; Thean, Aaron; Verkest, Diederik; Lebon, Hans; Steegen, An (2013)