Publication:

The need for EUV lithography at advanced technology for sustainable wafer cost

Date

2013

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Mallik, Arindam

;

;

Ryckaert, Julien

;

Mercha, Abdelkarim

;

Horiguchi, Naoto

;

Demuynck, Steven

;

Boemmels, Juergen

;

;

Vandenberghe, Geert

;

;

;

Verkest, Diederik

;

;

Metrics

1892 since deposited on 2021-10-21

Acq. date: 2026-01-10