Publication:

The need for EUV lithography at advanced technology for sustainable wafer cost

Date

2013

Proceedings Paper

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Author(s)

Mallik, Arindam

;

;

Ryckaert, Julien

;

Mercha, Abdelkarim

;

Horiguchi, Naoto

;

Demuynck, Steven

;

Boemmels, Juergen

;

;

Vandenberghe, Geert

;

;

;

Verkest, Diederik

;

;

Statistics

1896 since deposited on 2021-10-21

Acq. date: 2026-04-07