Browsing by author "Kato, Shinichi"

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Nanometer-deep junctions with high doping concentration for Ge SDEs using solid-source doping and flash lamp annealing

Tanimura, Hideaki; Fuse, Kazuhiko; Yamada, Takahiro; Aoyama, Takayuki; Kato, Shinichi; Kobayashi, Ippei; Blanquart, Timothee; Collaert, Nadine (2017-06)