Authors

Tanimura, Hideaki; Fuse, Kazuhiko; Yamada, Takahiro; Aoyama, Takayuki; Kato, Shinichi; Kobayashi, Ippei; Blanquart, Timothee; Collaert, Nadine

Conference

17th International Workshop on Junction Technology - IWJT

Title

Nanometer-deep junctions with high doping concentration for Ge SDEs using solid-source doping and flash lamp annealing

Publication type

Proceedings paper

Embargo date

9999-12-31