Browsing by author "Haider, Ali"
Now showing items 1-2 of 2
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Dry Resist Metrology Readiness for High-NA EUVL
Lorusso, Gian; Van den Heuvel, Dieter; Zidan, Mohamed; Moussa, Alain; Beral, Christophe; Charley, Anne-Laure; De Simone, Danilo; De Silva, Anuja; Verveniotis, Elisseos; Haider, Ali; Kondo, Tsuyoshi; Shindo, Hiroyuki; Ebizuka, Yasushi; Isawa, Miki (2023) -
E-beam metrology and line local critical dimension uniformity of thin dry resist films for high numerical aperture extreme ultraviolet lithography
Zidan, Mohamed; Lorusso, Gian; De Simone, Danilo; De Silva, Anuja; Haider, Ali; Verveniotis, Elisseos; Moussa, Alain; De Gendt, Stefan (2023)