Browsing by author "Atsuko, Yamaguchi"

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Precise measurement of thin film thickness in 3D-NAND device with CD-SEM

Ohashi, Takeyoshi; Atsuko, Yamaguchi; Kobayashi, Takashi; Inoue, Osamu; Hasumi, Kazuhisa; Ikota, Masami; Tan, Chi Lim; Van den Bosch, Geert; Lorusso, Gian; Furnemont, Arnaud (2016)