Publication:

Precise measurement of thin film thickness in 3D-NAND device with CD-SEM

Date

2016

Presentation

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Author(s)

Ohashi, Takeyoshi

;

Atsuko, Yamaguchi

;

Kobayashi, Takashi

;

;

Hasumi, Kazuhisa

;

;

;

Van den Bosch, Geert

;

;

Furnemont, Arnaud

Statistics

1987 since deposited on 2021-10-23

Acq. date: 2026-05-02