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Precise measurement of thin film thickness in 3D-NAND device with CD-SEM

Date

2016
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dc.contributor.authorOhashi, Takeyoshi
dc.contributor.authorAtsuko, Yamaguchi
dc.contributor.authorKobayashi, Takashi
dc.contributor.authorInoue, Osamu
dc.contributor.authorHasumi, Kazuhisa
dc.contributor.authorIkota, Masami
dc.contributor.authorTan, Chi Lim
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorLorusso, Gian
dc.contributor.authorFurnemont, Arnaud
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.date.accessioned2021-10-23T13:20:25Z
dc.date.available2021-10-23T13:20:25Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27089
dc.source.conference42nd Micro and Nano Engineering Conference
dc.source.conferencedate19/09/2016
dc.source.conferencelocationVienna Austria
dc.title

Precise measurement of thin film thickness in 3D-NAND device with CD-SEM

dc.typeOral presentation
dspace.entity.typePublication
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