Publication:
Precise measurement of thin film thickness in 3D-NAND device with CD-SEM
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1983 since deposited on 2021-10-23
4last month
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Acq. date: 2026-01-09
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Views
1983 since deposited on 2021-10-23
4last month
1last week
Acq. date: 2026-01-09
Citations