Browsing by author "Wang, Sharon"
Now showing items 1-2 of 2
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Development of a non-destructive thin film porosimetry: pore size distribution and pore volume of porous silica
Baklanov, Mikhaïl; Dultsev, F. N.; Kondoh, Eiichi; Mogilnikov, K. P.; Maex, Karen; Wang, Sharon; Forester, Lynn (1999) -
Integration of non-etchback low-k methy silsequioxane polymer using electron beam cure
Gao, Teng; Coenegrachts, Bart; Waeterloos, Joost; Van Hove, Marleen; Maex, Karen; Yang, Jiping; Wang, Sharon; Forester, Lynn (1999)