Integration of non-etchback low-k methy silsequioxane polymer using electron beam cure

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Authors
Gao, Teng; Coenegrachts, Bart; Waeterloos, Joost; Van Hove, Marleen; Maex, Karen; Yang, Jiping; Wang, Sharon; Forester, Lynn
Conference
Advanced Metallization Conference in 1998 - AMC 1998
Title
Integration of non-etchback low-k methy silsequioxane polymer using electron beam cure
Publication type
Proceedings paper
Embargo date
9999-12-31
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