Browsing by author "Yatsuda, K"

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Cryoetching of silicon and advanced materials for 3D interconnects

Dussart, R.; Tillocher, T.; Gosset, N; Lefaucheux, P.; L'jazouli, R; Boufnichel, M.; Zhang, Liping; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Nishimura, E; Yatsuda, K; Maekawa, K (2014)
Cryogenic etching of porous organosilicate low-k materials: fluorine based plasma analysis

Leroy, F; Tillocher, T; Zhang, Liping; Girard, A.; Cardinaud, C.; Lefaucheux, P.; de Marneffe, Jean-Francois; Dussart, R.; Maekawa, K; Yatsuda, K; Baklanov, Mikhaïl (2015)