Browsing by author "Kupers, Michiel"
Now showing items 1-3 of 3
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Application of immersion lithography inside the MEDEA+ LIQUID project
Massin, Jean; Kupers, Michiel; Thony, Philippe; Postnikov, Sergei; Ercken, Monique; Morton, Rob (2005) -
EUV vote-taking lithography for mitigation of printing mask defects, CDU improvement, and stochastic failure reduction
Bekaert, Joost; De Bisschop, Peter; Beral, Christophe; Hendrickx, Eric; van de Kerkhof, Mark A..; Bouten, Sander; Kupers, Michiel; Schiffelers, Guido; Verduijn, Erik; Brunner, Timothy (2018) -
EUV vote-taking lithography: Crazy.... or not ?
Bekaert, Joost; De Bisschop, Peter; Beral, Christophe; Hendrickx, Eric; van de Kerkhof, Mark A.; Bouten, Sander; Kupers, Michiel; Schiffelers, Guido; Verduijn, Erik; Brunner, Timothy (2018)