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EUV vote-taking lithography for mitigation of printing mask defects, CDU improvement, and stochastic failure reduction
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1931 since deposited on 2021-10-25
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Acq. date: 2026-01-09
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Views
1931 since deposited on 2021-10-25
1last month
1last week
Acq. date: 2026-01-09
Citations