Authors

Bekaert, Joost; De Bisschop, Peter; Beral, Christophe; Hendrickx, Eric; van de Kerkhof, Mark A..; Bouten, Sander; Kupers, Michiel; Schiffelers, Guido; Verduijn, Erik; Brunner, Timothy

ISSN

1932-5150

Issue

4

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

17

Title

EUV vote-taking lithography for mitigation of printing mask defects, CDU improvement, and stochastic failure reduction

Publication type

Journal article

Embargo date

9999-12-31