Publication:

EUV vote-taking lithography for mitigation of printing mask defects, CDU improvement, and stochastic failure reduction

Date

2018
Journal article
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Author(s)

Bekaert, Joost  
;
De Bisschop, Peter  
;
Beral, Christophe  
;
Hendrickx, Eric  
;
van de Kerkhof, Mark A..
;
Bouten, Sander
;
Kupers, Michiel
;
Schiffelers, Guido  
;
Verduijn, Erik  
;
Brunner, Timothy

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Abstract

Description

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