Browsing by author "Michling, Marcel"

Now showing items 1-2 of 2

In-situ studies of the chemistry of trimethyl-aluminum on III-V semiconductor surfaces

Adelmann, Christoph; Tallarida, Massimo; Cuypers, Daniel; Rodriguez, Leonard; Michling, Marcel; Friedrich, Daniel; De Clercq, Astrid; Delabie, Annelies; Conard, Thierry; Van Elshocht, Sven; Locquet, Jean-Pierre; Schmeisser, Dieter; Caymax, Matty (2012)
Interface chemistry of Al2O3/III-V upon atomic layer deposition

Tallarida, Massimo; Adelmann, Christoph; Cuypers, Daniel; Rodriguez, Leonard; Lin, Dennis; Michling, Marcel; Friedrich, Daniel; De Clercq, Astrid; Delabie, Annelies; Van Elshocht, Sven; Locquet, Jean-Pierre; Caymax, Matty; Schmeisser, Dieter (2012)