In-situ studies of the chemistry of trimethyl-aluminum on III-V semiconductor surfaces

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Authors
Adelmann, Christoph; Tallarida, Massimo; Cuypers, Daniel; Rodriguez, Leonard; Michling, Marcel; Friedrich, Daniel; De Clercq, Astrid; Delabie, Annelies; Conard, Thierry; Van Elshocht, Sven; Locquet, Jean-Pierre; Schmeisser, Dieter; Caymax, Matty
Conference
39th Conference on the Physics and Chemistry of Surfaces and Interfaces - PCSI
Title
In-situ studies of the chemistry of trimethyl-aluminum on III-V semiconductor surfaces
Publication type
Meeting abstract
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