Browsing by author "Whelan, S."
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High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si
van den Berg, J.A.; Armour, D.G.; Werner, M.; Whelan, S.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q. (2002)