Authors

van den Berg, J.A.; Armour, D.G.; Werner, M.; Whelan, S.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q.

Conference

Proceedings 14th International Conference on Ion Implantation Technology Conference

Title

High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si

Publication type

Proceedings paper