Publication:
High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si
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1877 since deposited on 2021-10-14
3last month
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Acq. date: 2026-03-17
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Statistics
Views
1877 since deposited on 2021-10-14
3last month
2last week
Acq. date: 2026-03-17
Citations